DeSalvo Gregory C.; Sewell James S.; Quach Tony K.; Pettiford Carl I.; Nakano Kenichi; Jenkins Thomas J.; Havasy Charles K.; Gillespie James K.; Dettmer Ross W.; Cerny Charles L. A.; Barrette John P.; Look David C.; Ebel John L.; Bozada Christopher A.; Via G. David
Wet Chemical Digital Etching of GaAs at Room Temperature
J. Electrochem. Soc. 143, 3652 (1996)
Electron Devices Division, Avionics Directorate, Wright Laboratory, Wright‐Patterson Air Force Base, Ohio 45433‐7322;